Research and Development for Copper Interconnect Technology

Atotech's Partnership with The College of Nanoscale Science and Engineering (CNSE)

Atotech's partnership with CNSE focuses on the development and optimization of copper deposition technologies for use in advanced device structures. The partnership provides Atotech engineers exclusive access to R&D activities with the College and its 250 global corporate partners. Together with these partners, Atotech supports the development towards sub-22 nm node technologies with contributions of engineering know-how and advanced, cost-competitive plating chemistries.

Through this partnership, Atotech and CNSE engineers work closely together to develop and deliver functional and technical process solutions for smaller and more efficient devices. The joint R&D focuses on the optimization of the processing steps and analytical methods which impact the copper wiring technologies in semiconductor applications. Nano size defect densities, stability of low resistance, and the robustness of electrical and stress migration define the quality of the deposited copper during reliability testing conditions.

The R&D conducted at CNSE focuses on the understanding of these interactions and the exploration of solutions needed for the scaling to smaller structures.

About CNSE

The College of Nanoscale Science and Engineering is the first college in the world dedicated to education, research, development and deployment in the emerging disciplines of nanoscience, nanoengineering, nanobioscience, and nanoeconomics.

With over $5.5 billion in high-tech investments, the 800,000-square-foot Albany NanoTech Complex attracts corporate partners from around the world and offers students a one-of-a-kind academic experience.

More than 2,500 scientists, researchers, engineers, students, and faculty work on site at CNSE's Albany NanoTech Complex, from companies including IBM, AMD, GlobalFoundries, SEMATECH, Toshiba, Applied Materials, Tokyo Electron, ASML, Novellus Systems, Vistec Lithography and Atotech.

For more information, visit www.cnse.albany.edu.