Berlin, January 23 – MKS’ Atotech will be exhibiting at Semicon Korea 2023. The show will be held at COEX, Seoul from February 1-3 and our team will be at booth C844 in hall C to inform about our ECD processes for advanced packaging and electroless processes for power semiconductors.
The fabrication of modern semiconductor devices requires different plating solutions for the different applications and structures. Atotech provides the complete plating offering for pillars, micro vias, fine line RDL (redistribution layer) and solder application which are required in advanced packaging. Additionally, we offer leading ENEPIG plating solutions for pad metallization for power applications.
Our show highlights include: Spherolyte® Cu UF 3 and Spherolyte® Cu DB / NT Cu.
Spherolyte® Cu UF 3 serves to deposit pure Cu for RDL and via filling in advanced packaging applications such as in fan-out wafer level packaging (FOWLP). Spherolyte® UF 3 enables high reliability with higher via filling performance, stable plating uniformity and higher copper purity compared to conventional Cu processes.
In addition, our R&D processes Spherolyte® Cu DB and Spherolyte® NT Cu are targeted towards next generation Cu-to-Cu hybrid bonding applications with low annealing temperatures. Spherolyte® Cu DB is one of our processes, allowing the deposition of metastable copper, while Spherolyte® NT Cu allows the deposition of copper nanotwins.
Event: Semicon Korea 2023
Date: February 1-3, 2023
Venue: COEX, Seoul
For more information on Semicon Korea please visit: SEMICON KOREA 2023.
About MKS Instruments
MKS Instruments enables technologies that transform our world. We deliver foundational technology solutions to leading edge semiconductor manufacturing, advanced electronics and specialty industrial applications. We apply our broad science and engineering capabilities to create instruments, subsystems, systems, process control solutions and specialty chemicals technology that improve process performance, optimize productivity and enable unique innovations for many of the world’s leading technology and industrial companies. Our solutions are critical to addressing the challenges of miniaturization and complexity in advanced device manufacturing by enabling increased power, speed and feature enhancement for optimized connectivity. Our solutions are also critical to addressing ever-increasing performance requirements across a wide array of specialty industrial applications. Additional information can be found at www.mks.com.
About MKS’ Atotech
Atotech, a brand within the Materials Solutions Division of MKS Instruments, develops leading process and manufacturing technologies for advanced surface modification, electroless and electrolytic plating, and surface finishing. Applying a comprehensive systems-and-solutions approach, Atotech’s portfolio includes chemistry, equipment, software, and services for innovative and high-technology applications. These solutions are used in a wide variety of end-markets, including datacenter, consumer electronics and communications infrastructure, as well as in numerous industrial and consumer applications such as automotive, heavy machinery, and household appliances.
With its well-established innovative strength and industry-leading global TechCenter network, MKS delivers pioneering solutions through its Atotech brand – combined with unparalleled on-site support for customers worldwide. For more information about Atotech, please visit us at atotech.com.