선도적인 고급 패키징 및

전력 반도체용 도금 솔루션

제품 포트폴리오

반도체

패드 금속화, 구리 필러, RDL, 비아 및 이중 다마신용 통합 습식 화학 공정

간략한 정보

  • 전기 화학적 증착 공정 및 장비 솔루션
  • 차세대 고급 패키징을 위한 RDL, 비아, 필러 및 솔더링
    애플리케이션용 도금 공정
  • 패드 금속화 및 RDL 하우징용(예: 전력 반도체 애플리케이션) 무전해 증착 공정
  • 최신 배선 기술을 위한 이중 다마신 도금용 전기 화학 솔루션
  • 독일의 최첨단 제조 현장

애플리케이션

  • 전원 칩 및 메모리용 ENEPIG를 통한 패드 금속화
  • FOWLP 및 FC-CSP용 RDL, µ-비아, 필러 도금
  • 센서 및 3D 스태킹용 µ-via 및 스루 실리콘 비아 도금
  • 전력 칩용 양면 금속화(예: IGBT, MOSFETS 등)
  • 로직, 메모리, 파워 IC용 배선 금속화

제품 포트폴리오

고급 패키징 – RDL 및 µ-비아 도금

FOWLP 및 FC-CSP와 같은 최신 패키징 기술에는 다양한 구조에 대한 여러 가지 도금 솔루션이 필요합니다. 미세 라인 RDL은 평면 내에서 전기적 확장이 일어나도록 하므로 이종 통합을 지원하는 데 있어 매우 중요합니다.

  • Spherolyte® Cu UF3: 최고의 신뢰성을 자랑하는 RDL 및 µ-비아 증착용 고순도 구리 공정입니다.
  • Promobond® AP2: 차세대 패키징용 접착 촉진제입니다.

고급 패키징 - 필러 도금 및 솔더링

FOWLP 및 FC-CSP와 같은 최신 패키징 기술에는 다양한 구조만큼 다양한 도금 솔루션이 필요합니다. 기둥(Pillar)과 솔더범프(solderbumps)는 인터페이스 상효 연결에 사용되므로 이종 통합을 활성화하는데 중요합니다.

  • Spherolyte® Cu UF 5: 뛰어난 균일성, 고순도 및 전체 형상 제어를 갖춘 구리 기둥용 고속 공정입니다.
  • Spherolyte® Ni: 효과적인 니켈(Ni) 배리어층 도금을 위한 액체 공정입니다.
  • Spherolyte® SnAg: 솔더(solder) 애플리케이션을 위한 매우 균일하고 안정적인 주석 은 공정입니다.
  • Spherolyte® Sn: 매우 균일하고 순수한 주석 솔더 디폿(depot) 도금을 위한 공정입니다.

ENEPIG 도금 - 패드 금속화 및 RDL 하우징

와이어 본딩 및 솔더링(soldering)은 매우 안정적인 접합 형성을 위해 UBM(Under Bump Metallization)이 필요한 경우가 많습니다. 아토텍 Xenolyte® 제품군을 사용하면 단단하고 부식이 없으며 응력이 최소화된 금속 스택(stacks)을 증착하여 기본 활성 구조를 보호할 수 있습니다. 더불어 IC 기판에 견고하고 안정적이며 저항이 낮은 솔더 조인트 연결도 제공합니다.

  • Xenolyte® Ni: 중저 팔라듐(low- to mid Pd) 및 고온 무전해 니켈(Ni) 도금 공정
  • Xenolyte® Pd: 고순도에 신뢰성이 높은 팔라듐 무전해 증착 공정
  • Xenolyte® Au: 사이안화물 불포함 및 사이안화물 기반의 침지및 자가촉매 금(Au) 공정

로직, 메모리, 파워 IC용 배선 금속화 솔루션

차세대 인터커넥트(interconnect) 기술은 구리 다마신 BEOL 인터커넥트용의 극도로 얇은 시드 레이어와 호환되고 구리 및 코발트 인터커넥트 모두에 대해 프리플레이트(pre-plate) 개구부를 보이드 없이 충진할 수 있는 습식 금속화 프로세스의 극한 성능을 요구합니다.

Everplate® 2XT: 고급 다마신 구리(Cu) 기술 노드를 충진할 수 있는 고성능 첨가제 제품군

전력 칩용 양면 금속화(예: IGBT, MOSFETS 등)

최신 IGBT 및 전력 MOSFET은 웨이퍼 양면에 금속화가 필요합니다. 첫 번째 앞면과 뒷면을 순차적으로 도금하는 표준 방식은 웨이퍼 처리 중 응력과 변형 문제로 어려움을 겪는 경우가 많습니다. 파워 패키지에 다이(dies)를 내장(embeded)하는 데 필요한 얇은 웨이퍼는 특히 이러한 영향을 받기 쉽습니다. 이러한 이유로 웨이퍼 가공 중 효과적인 응력과 변형 최소화가 필요합니다.

MultiPlate® + Spherolyte® MD2: 도금 장비 솔루션 및 전해 증착 구리(Cu) 프로세스를 통해 프로세스 흐름을 줄인 동시 양면 구리 도금을 수행합니다.

MKS 아토텍의 반도체 도금 솔루션

아토텍은 고급 패키징 및 전력 반도체 애플리케이션을 위한 업계 최고의 솔루션을 제공합니다.

본 영상을 통해서 고객이 최첨단 차세대 반도체 장치를 생산할 수 있도록 지원하는 아토텍의 Spherolyte® Xenolyte® 공정 솔루션에 대한 몇 가지 예시를 확인할 수 있습니다.

High-purity chemistry manufacturing

고순도 약품 생산

반도체 산업용 약품

아토텍은 가장 엄격한 최신 반도체 산업 요건에 따라 고순도 약품을 생산합니다. 독일 베를린 인근에 위치한 1,500m² 규모의 아토텍 제조 시설은 고도로 자동화된 제조 장비와 폐쇄된 생산 환경을 갖추고 있어 효율적이고 안전하며 친환경적이고 신뢰할 수 있는 생산을 보장합니다.

자세히 알아보기

“아토텍은 반도체 산업에 동급 최고의 금속화 솔루션을 제공하고자 지속적으로 노력합니다. 이를 통해 차세대 기술 개발을 위한 고객의 소중한 파트너가 됩니다.”

Dr. Christian Ohde
Global Product Director Semiconductor Advanced Packaging Products at Atotech Germany

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    • 薬品製造工場

    アトテックジャパン株式会社
    444-0122
    愛知県額田郡幸田町六栗下大迫1-6

    Tel.: +81 564 62 14 15
    Fax.: +81 564 56 90 00

    Email: japan@atotech.com
    Local information

    Korea

    Jangan

    • TechCenter Electronics
    • TechCenter General metal finishing
    • Chemistry production

    Atotech Korea Ltd.
    37, Jangangongdan 1-gil, Jangan-myeon,
    Hwaseong-si, Gyeonggi-do, ZIP: 18579
    Korea

    Tel.: +82 31 359 3000
    Fax.: +82 31 351 8557

    Email: info-korea@atotech.com
    Local information

    Seoul

    • Sales office

    Atotech Korea Ltd.
    7F Dongsung building, 21 Gukhoe-Daero 62-Gil,
    Yeongdeungpo-Gu, Seoul, ZIP: 07236
    Korea

    Tel.: +82 2 550 7200
    Fax.: +82 2 561 0015

    Email: info-korea@atotech.com

    Busan

    • Sales office

    Atotech Korea Ltd.
    #403 Busan Cheongjeongdogeum Center,
    20 Noksansandan 382-ro 14gil,
    Gangseo-gu, Busan, ZIP: 46757
    Korea

    Tel.: +82 51 973 0510
    Fax.: +82 51 973 1579

    Email: info-korea@atotech.com

    Korea

    장안

    • TechCenter Electronics
    • TechCenter General metal finishing
    • Chemistry production

    Atotech Korea Ltd.
    경기도 화성시 장안면 장안공단 1길 37
    (zip: 18579)

    Tel.: +82 31 359 3000
    Fax.: +82 31 351 8557

    Email: info-korea@atotech.com
    Local information

    서울

    • Sales office

    Atotech Korea Ltd.
    서울시 영등포구 국회대로 62길 21
    동성빌딩 7층 (ZIP: 07236)

    Tel.: +82 2 550 7200
    Fax.: +82 2 561 0015

    Email: info-korea@atotech.com

    부산

    • Sales office

    Atotech Korea Ltd.
    부산시 강서구 녹산산단 382로 14번가길 20
    (송정동), 부산 청정도금센터 403호 (zip:46757)

    Tel.: +82 51 973 0510
    Fax.: +82 51 973 1579

    Email: info-korea@atotech.com

    Lithuania

    Vilnius

    • Sales office

    UAB Atotech-Chemeta
    Konstitucijos pr. 21A
    LT-08130 Vilnius
    Lietuva

    Tel.: +370 5 272 93 94
    Local information

    Generalinis direktorius

    Gražina Kontrimavičiūtė
    Tel.: + 370 5 272 93 94
    El.paštas: Grazina.Kontrimaviciute@atotech.com

    Lithuania

    Verslo plėtros direktorius

    Dr. Jaroslaw Rozwadowski
    Tel.: + 48 61 662 27 35
    El.paštas: Jaroslaw.Rozwadowski@atotech.com

    Pardavimų vadovas

    Juozas Daukšas
    Tel.: + 370 5 272 93 94
    El.paštas: Juozas.Daukshas@atotech.com

    Malaysia

    Penang

    • Chemistry production

    Atotech Malaysia Sdn. Bhd.
    1182, Lorong Perindustrian Bukit Minyak 22
    Taman Perindustrian Bukit Minyak
    14100 Simpang Ampat
    Pulau Pinang

    Malaysia

    Tel.: +60 4 506 9800
    Fax.: +60 4 506 2280

    Email: atotech.pnng-cs@atotech.com

    Malaysia

    Selangor

    • Sales office

    Atotech Malaysia Sdn. Bhd.
    Lot 6.03A, Level 6, 1 Tech Park
    Tanjung Bandar Utama
    Bandar Utama, 47800 Petaling Jaya
    Selangor Darul Ehsan

    Malaysia

    Tel.: +60 3 7732 3070

    Email: atotech.pnng-cs@atotech.com

    Mexico

    Querétaro

    • Chemistry production
    • Sales office

    Atotech de México S.A. de C.V.
    Carretera Estatal 100
    No. 4200 Lote 33/34, Interior 4-H/4-G
    Parque Industrial Aeropuerto San Ildefonso
    Colón, Querétaro

    México, C.P. 76295

    Tel.: +52 4422 9588 62

    Mexico

    Business Development Manager
    Norberto Pineda Salinas
    Email: norberto.pineda@atotech.com
    Tel. (cell): +52 1 55 8580 7816

    Sales Manager
    José Alberto Benedito Morant
    Email: alberto.benedito@atotech.com
    Tel. (cell): +52 1 55 2272 0507

    Peru

    Lima

    Anders Peru S.A.C.
    • Distributor Peru

    Anders Peru S.A.C.
    JR. PASEO DEL BOSQUE Nro. 500, Int. 301
    URB. CHACARILLA DEL ESTANQUE
    SAN BORJA, 15037 LIMA
    Peru

    Tel.: +51 1 615 86 00
    Fax.: +51 1 615 86 10

    Email: horst.eichhorn@qanders.com

    Philippines

    Muntinlupa City

    • Sales office

    Atotech (Philippines) Chemicals, Inc.
    401-402 B2 L7
    CTP Alpha Building
    Investment Drive
    Madrigal Business Park
    Alabang, Muntinlupa City
    Philippines, 1780

    Tel.: +63 2 834 0100
    Fax.: +63 2 833 2282

    Email: singapore-cse@atotech.com
    Local information

    Poland

    Poznań

    • Sales office

    Atotech Poland Sp.z o.o.
    Ul. Marcelińska 92/94
    60-324 Poznań
    Poland

    Tel.: +48 61 662 27 35
    Fax.: +48 61 662 19 02

    Email: atotech.pozn-office@atotech.com
    Local information

    Managing Director

    Jarosław Rozwadowski
    Email: jaroslaw.rozwadowski@atotech.com

    Poland

    Deputy Business Director, Business Manager GMF, Electronics

    Rafał Janowicz
    Tel.: +48 506 176 303
    Email: rafal.janowicz@atotech.com

    Przedstawiciel Techniczno-Handlowy GMF

    (Klasyczna galwanotechnika – Procesy antykorozyjne, cynk lamelarny, nikiel chemiczny, chrom techniczny)

    Magdalena Gortat
    PMM CRC/ZF
    Tel.: + 48 506 368 167
    Email: magdalena.gortat@atotech.com

    Przedstawiciel Techniczno-Handlowy GMF

    (Klasyczna galwanotechnika - Technologie dekoracyjne, pokrywanie plastiku)

    Jacek Chomiuk
    PMM DECO/POP
    Tel.: + 48 506 176 294
    Email: jacek.chomiuk@atotech.com

    Przedstawiciel Techniczno-Handlowy PST

    (Technologie wspierające procesy malowania- przygotowanie powierzchni, stripowanie farby)

    Tomasz Ilski
    Tel.: +48 512 368 712
    Email: tomasz.ilski@atotech.com

    Przedstawiciel Techniczno-Handlowy Electronika

    (PCB – Produkcja płytek obwodów drukowanych)

    Michał Zaczek
    Tel.: +48 61 662 27 35
    Email: michal.zaczek@atotech.com

    Portugal

    Aveiro

    • Sales office

    Atotech España S.A.U.
    Sucursal em Portugal
    Av. Europa, nº 473 C
    3800 – 228 Aveiro
    Portugal

    Tel.: +351 234 729 800

    Email: atotech.es@atotech.com
    Local information

    Spain

    Erandio

    Main office
    • Sales office

    Atotech España S.A.U.
    Sociedad Unipersonal
    Apartado 156 - 48950 Erandio
    Ribera de Axpe, 39
    48950 Erandio - Bizkaia
    España

    Tel.: +34 944 8030 55 / 00
    Fax.: +34 944 8030 21 / 12

    Email: atotech.es@atotech.com
    Local information

    Spain

    Barcelona

    Delegación Cataluña and Valencia
    • Sales office

    Atotech España S.A.U.
    Sociedad Unipersonal
    Parc Tecnològic del Vallès
    Ronda Can Fatjó, 8
    08290 Cerdanyola del Vallès (Barcelona)
    España

    Tel.: +34 93 680 11 77
    Fax.: +34 93 680 00 22

    Email: atotech.es@atotech.com
    Local information

    Portugal

    Aveiro

    Sociedad Unipersonal/Sucursal em Portugal
    • Sales office

    Atotech España S.A
    Sociedad Unipersonal
    Sucursal em Portugal
    Avda. Europa, Nr. 473 - C
    3800 - 228 Aveiro
    Portugal

    Tel.: +351 234 729 800

    Email: atotech.es@atotech.com
    Local information

    Romania

    Cluj Napoca

    Sucursala Italia
    • Sales office

    Calea Dorobantilor Nr. 14-16
    400117 - Cluj City Center, office 003
    Romania

    Tel.: +40 37106 4033
    Fax.: +40 37289 3814

    Email: atotech.romania@atotech.com

    Scandinavia

    Norrköping

    • Sales office

    Atotech Skandinavien AB
    Slottsgatan 33
    Box 5, SE-60102 Norrköping
    Sweden

    Tel.: +46 11 36 11 00
    Fax.: +46 11 10 01 62

    Email: sales.scan@atotech.com

    Singapore

    Singapore

    • FEC competence center
    • TechCenter Electronics
    • Sales office

    Atotech (Singapore) Chemicals Pte. Ltd.
    8 Buroh Street
    Unit #03-01
    Surface Engineering Hub
    Singapore 627563

    Tel.: +65 6862 26 18
    Fax.: +65 6862 15 06

    Email: singapore-cse@atotech.com
    Please send your job application to:
    Atotech.SPOR-HRD@atotech.com
    Local information

    Slovakia

    Banská Bystrica

    • Sales office

    Atotech SK, s.r.o.
    J. Chalupku 8
    974 01 Banská Bystrica
    Slovakia

    Tel.: +421 484 700 162 164
    Fax.: +421 484 700 161

    Email: bystrica@atotech.com

    Slovenija

    Podnart

    • Chemistry production

    Atotech Slovenija d.d.
    Podnart 43
    4244 Podnart
    Slovenija

    Tel.: +386 4 537 60 00

    Email: Atotech.PODN-INFO@atotech.com

    Informacija za javnost februar 2024

    Spain

    Erandio

    Main office
    • Sales office

    Atotech España S.A.U.
    Sociedad Unipersonal
    Apartado 156 - 48950 Erandio
    Ribera de Axpe, 39
    48950 Erandio - Bizkaia
    España

    Tel.: +34 944 8030 55 / 00
    Fax.: +34 944 8030 21 / 12

    Email: atotech.es@atotech.com
    Local information

    Spain

    Barcelona

    Delegación Cataluña and Valencia
    • Sales office

    Atotech España S.A.U.
    Sociedad Unipersonal
    Parc Tecnològic del Vallès
    Ronda Can Fatjó, 8
    08290 Cerdanyola del Vallès (Barcelona)
    España

    Tel.: +34 93 680 11 77
    Fax.: +34 93 680 00 22

    Email: atotech.es@atotech.com
    Local information

    Portugal

    Aveiro

    Sociedad Unipersonal/Sucursal em Portugal
    • Sales office

    Atotech España S.A
    Sociedad Unipersonal
    Sucursal em Portugal
    Avda. Europa, Nr. 473 - C
    3800 - 228 Aveiro
    Portugal

    Tel.: +351 234 729 800

    Email: atotech.es@atotech.com
    Local information

    Switzerland

    Courgenay

    • Sales office

    Atotech Deutschland GmbH & Co. KG
    Zweigniederlassung Courgenay
    Vertrieb Schweiz
    L'Armeratte 2
    CH - 2950 Courgenay
    Switzerland

    Tel.: +41 32 471 31 19
    Fax.: +41 32 566 13 29

    Email: info.schweiz@atotech.com

    Taiwan

    Taipei

    Main office
    • Sales office

    Atotech Taiwan Limited
    4F., No. 285
    Sec. 3 Nanjing E. Rd.
    Taipei 10550
    Taiwan

    Tel.: +886 2 2717 6868
    Fax.: +886 2 2713 2732

    Local information

    Taoyuan

    • Sales office

    Atotech Taiwan Limited
    5F., No. 15
    Jingguo Rd.
    Taoyuan City 33050
    Taiwan

    Tel.: +886 3 356 2468
    Fax.: +886 3 357 2585

    Local information

    Taiwan

    Kaohsiung

    • Customer support lab

    Atotech Taiwan Limited
    4F., No. 47, Dazhong 2nd Rd.
    Zuoying Dist., Kaohsiung City 813022
    Taiwan

    高雄市左營區大中二路47號4樓

    Tel.: +886 7 343 2876
    Fax.: +886 7 343 2898

    Local information

    Key Contacts / 主要聯絡人

    金屬表面處理 GMF
    李德芬 (Hannah Lee)
    Phone: +886 2 2717 6868 #303
    Email: Hannah.Lee@atotech.com

    電子事業部 EL
    李憶婷 (Bennia Lee)
    Phone: +886 3 356 2468 # 501
    Email: Bennia.Lee@atotech.com

    觀音研發中心 Guanyin ATC
    謝廷偉 (Casper Hsieh)
    Phone: +886 3 438 9788 # 601
    Email: Casper.Hsieh@atotech.com

    半導體 SC
    陳彥合 (Bobby Chen)
    Phone: +886 3 356 2468 # 950
    Email: Bobby.Chen@atotech.com

    高雄研發中心Kaohsiung ATC
    龔嫊婷 (Tina Kung)
    Phone: +886 7 343 2876 # 701
    Email: Tina.Kung@atotech.com

    環安衛HES
    郭宜慧 (Rosa Kuo)
    Phone: +886 3 438 9788 # 881
    Email: Rosa.Kuo@atotech.com

    人資行政HR
    陳雅莉 (Alice Chen)
    Phone: +886 2 2717 6868 # 113
    Email: Alice.Chen@atotech.com

    Taiwan

    Guanyin

    • TechCenter Electronics
    • Chemistry production

    Atotech Taiwan Limited
    11, Jingjian 2nd Rd.
    Guanyin Industrial Park
    Taoyuan City 32853
    Taiwan

    Tel.: +886 3 438 9788
    Fax.: +886 3 438 9792

    Local information

    Thailand

    Bangkok

    • Sales office

    Atotech (Thailand) Co., Ltd.
    11th Floor, 1 TP&T Tower
    Soi 19, Vibhavadee Rungsit Road
    Chatuchak, Chatuchak, Bangkok 10900
    Thailand

    Tel.: +66 293 618 73
    Fax.: +66 293 618 76

    Email: thomas.beck@atotech.com

    The Netherlands

    De Meern

    Main office
    • Sales office

    Atotech B.V.
    Strijkviertel 35-2
    3454 PJ De Meern
    The Netherlands

    Tel.: +31 30 240 90 10

    Email: sales.nl@atotech.com

    Organisation announcement Covid 19 (March 17)

    The Netherlands

    Sofia

    Branch office Bulgaria
    • Sales office

    Atotech B.V. (Nederland)
    Zk Drujba Bl. 223-B-46
    1582 Sofia
    Bulgaria

    Tel.: +359 886 816 816
    Fax.: +359 888 634 149

    Email: elitsapetrova@atotech-bg.com

    Turkey

    Istanbul

    • Sales office
    • Customer service lab

    Atotech İstanbul Kimya Sanayi Tic. Ltd. Şti.
    Barbaros Mah.
    Nesime Hanım Sok. No:4
    34746. Ataşehir - İstanbul
    Turkey

    Tel.: +90216 593 23 90
    Fax.: +90216 593 23 98

    Email: kansav.atila@atotech.com

    Turkey

    Izmir

    • Sales office
    • Customer service lab

    Atotech İstanbul Kimya Sanayi Tic. Ltd. Şti.
    Halkapınar Mah.
    1203/12 Sok. No: 2/1.
    35170. Konak - İzmir
    Turkey

    Tel.: +90 232 435 92 93
    Fax.: +90 232 435 95 99

    Email: kansav.atila@atotech.com

    Ukraine

    Kiev

    GALVANOMAYSTER Ltd.
    • Distributor Ukraine

    GALVANOMAYSTER Ltd.
    Mr. Volodymyr Baranovskyi
    Yevhen Sverstiuk Str. 11
    02660 Kiev
    Ukraine

    Tel.: +38 044 516 86 90
    Fax.: +38 044 517 16 13

    Email: v.baranovskyi@galvanomayster.kiev.ua

    United Kingdom

    West Bromwich

    • Sales office

    Atotech UK Ltd.
    William Street, West Bromwich
    West Midlands B70 0BG
    United Kingdom

    Tel.: +44 121 606 77 77
    Fax.: +44 121 606 72 00

    Email: sales.uk@atotech.com
    Local information

    UAE

    Ajman

    Al Taher Chemicals
    • Distributor U.A.E.

    Al Taher Chemicals Trading LLC
    Near Lucky R/A
    Industrial Area-2
    P.O. Box – 18912
    Ajman
    U.A.E.

    Tel.: +971 6 7482593

    Email: info@altaherchemicals.com

    USA

    Rock Hill

    Regional headquarters
    • Chemistry production
    • TechCenter Electronics
    • TechCenter General metal finishing

    Atotech USA, LLC
    1750 Overview Drive
    Rock Hill, SC 29730
    USA

    Tel.: +1 803 817 3500
    Fax.: +1 803 817 3602

    Email: usainfo@atotech.com
    Local information

    USA

    Detroit

    • Customer analytics laboratory
    • Warehouse

    Atotech USA, LLC
    35840 Beattie Drive,
    Sterling Heights, Michigan 48312
    USA

    Tel.: 1-800-PLATING

    Email: usainfo@atotech.com
    Local information

    Vietnam

    Ho Chi Minh City

    Main office
    • Sales office
    • Customer service lab

    Atotech Vietnam Co., Ltd.
    5F Hai Au Building
    39B Truong Son Street, Ward 4
    Tan Binh District
    Ho Chi Minh City
    Vietnam

    Tel.: +84 8 6296 1670
    Fax.: +84 8 6296 1675

    Vietnam

    Hanoi

    • Sales office
    • Customer service lab

    Atotech Vietnam Co., Ltd.
    Floor 2, VPI Building
    Trung Kinh Street, Yen Hoa Ward
    Cau Giay District
    Hanoi City
    Vietnam

    Tel.: +84 4 3768 7618
    Fax.: +84 4 3768 7619